一、HOC 6101 series
Resist Film Thickness:1.5-7um
Property:
1. Low curing temperature(60℃)
2. High transmittance(T%>98)
3. Low consumption(low film thickness)
4. High temperature resistant laser cutting
5. Acid recasting resistant
6. Low alkalinity solution stripping
二、应用领域:
1. 激光隐形切割 Stealth Dicing:超薄硅存储、CIS、WLCSP 先进封装;隔热防线路分层
2. 紫外激光烧蚀划片:SiC、GaN、蓝宝石 LED、玻璃、化合物半导体;吸附大量高温熔渣
3. 激光盲槽 / 隔离开槽:TSV 晶圆、功率芯片隔离沟槽、射频基板;抑制槽口金属碳化
4. 激光切割 + 等离子复合工艺:车规 SiC、高端光通信芯片;保护胶耐等离子,水洗无残留